Ph.D., Department of Precision Instruments and Mechanology, Tsinghua University, China, 2007
M.S., School of Mechanical and Electrical Engineering, Harbin Institute of Technology, China, 1998
B.S., School of Automotive Engineering,Harbin Institute of Technology, China, 1996
2013.1-Present, Department of Mechanical Engineering, Tsinghua University, China, Research Assistant
2010.9-2012.12, Department of Precision Instruments and Mechanology, Tsinghua University, China, Research Assistant
Research on Key Design Technologies of 45-22nm High Performance E-CHUCK in PVD, supported by National semiconductor equipment and manufacturing process major projects, China (2012-2014)
Yu. Zhu, Qiang. Li, Dengfeng. Xu, and Ming. Zhang. Modeling of axial magnetic force and stiffness of ring-shaped permanent magnets passive vibration isolator and its vibration isolating experiment. IEEE Transaction on Magnetics
Xudengfeng, Zhu yu. Dynamic analysis of a gas bearing support guide way through simplified beam model. International Technology and Innovation Conference 2006, ITIC 2006,Hangzhou, China,6-7 Nov. 2006 Page(s):1184 – 1187。
Xudengfeng, zhuyu. Principle and application of horizontal suspension isolator constituted by trilinear pendulum. Journal of Beijing University of Aeronautics and Astronautics,Vo.l 36 No1 8, August 2010, page 1005-1008
Xudengfeng, zhuyu. Improving Damping Capacity of the Aerostatic Bearing. Nanotechnology and Precision Engineering,Vo.l 8 No. 1, Jan. 2010,page 85-89
Xudengfeng, zhuyu. Performance analysis of dual-chamber pneumatic vibration isolator. Journal of Vibration and Shock, Vo.l 28 No. 9 2009, page 168-169