Ph.D., Candidate, Tsinghua University, 2005.7

M.S., China Academy of Launch Vehicle Technology, 1999.4

B.S., University of Science and Technology Beijing, 1996.7

2013.1-Present, Dept. of Mechanical Engineering, Tsinghua University, Associate Research Fellow

2011.10-2012.12, Dept. of Prec. Instrument and Mechanology, Tsinghua University, Associate Research Fellow

2007.10-2011.10, Dept. of Prec. Instrument and Mechanology, Tsinghua University, Research Assistant

2005.7-2007.9, Department of Engineering Mechanics, Tsinghua University, Postdoctoral Fellow

1999.4-2000.8, China Academy of Launch Vehicle Technology, Assistant Engineer

The design of ultra-precision motion stage of high-end semiconductor manufacturing equipment, including:

Ultra-precision mechanical design and manufacturing

System modeling and analysis

The design of high-precision linear motor and planar motor

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[8] Zhu Yu, Zhang Ming, Li Guang, Wang Jinsong, Hu Jinchun, Yin Wensheng, Yang Kaiming, Zhang Li, Ma Jing, Xu Yan, Li Yujie, Tian Li, Duan Guanghong. Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof. US Patent 8,599,361, 2013.