Ph.D., Candidate, Huazhong University of Science and Technology, 2007.6
M.A., Huazhong University of Science and Technology, 2003.7
B.S., Huazhong University of Science and Technology, 2000.7
Department of Mechanical Engineering, Tsinghua University, Assistant Professor, 2012.12-Present, full time
Department of Precision Instrument, Tsinghua University, Assistant Professor, 2010.10-2012.12, full time
Huazhong University of Science and Technology, Postdoctoral Fellow, 2007.12-2010.10, full time
Ultra-precision motion control and the principle of parameter calibration using couple
characteristics
Energy-based motion control theory for mechatronics
Vibration-free motion profile planning and generating
Servo control firmware and code auto-generating software development for equipment control software system
[1] Mu Haihua, Zhou Yunfei, et al. Calibration and compensation of cogging effect in a permanent magnet linear motor．Mechatronics, 2009．
[2] Mu Haihua, Zhou Yunfei, et al．Third-order trajectory planning for high precision point-to-point motion． Frontiers of Electrical and Electronic Engineering in Chain，2009．
[3] Zhu Yu, Zhang Shengguo, Mu Haihua．Augmentation of propulsion based on coil array commutation for magnetically levitated stage. IEEE Transactions on Magnetics, 2012.
[4] Zhang Shengguo, Zhu Yu, Mu Haihua．Decoupling and levitation control of a six-degree-of-freedom magnetically levitated stage with moving coils based on commutation of coil array. Proceedings of the Institution of Mechanical Engineers. Part I: Journal of Systems and Control Engineering, 2012.
[5] Teng Wei, Gao Qingfeng, Wu Xin, Mu, Haihua. Iterative tuning of decoupling controller for 3-DOF precision motion stage. Journal of Mechanical Science and Technology, 2012.
[6] Mu Haihua，Zhou Yunfei and Zhou Yanhong. Coupling mechanism analysis and dynamic modeling for Lorentz Motor montrol. Proceeding of the CSEE, 2009.
[7] Mu Haihua，Zhou Yunfei and Zhou Yanhong. Precision control of third-order profile planning for high accuracy point-to-point motion system. Journal of Mechanical Engineering, 2008.
[8] Mu Haihua，Zhou Yunfei and Zhou Yanhong. Trajectory planning and precision control of scan-move for step-scan lithography stage. Journal of Mechanical Engineering, 2010.
[9] Mu Haihua，Zhou Yunfei and Zhou Yanhong. Algorithm of trajectory overlay planning for step- and scan-move in Scanner Lithography. Journal of Mechanical Engineering, 2010.
[10] Mu Haihua，Zhou Yunfei, Wen Xin and Zhou Yanhong. Approach to calibrating and compensating cogging force ripple in linear motors. Electric Mechines and Control, 2009.
