Education background
2010/09-2016/07 Ph.D., Tsinghua University
2006/09-2010/07 A. B., China University of Mining & Technology, Beijing
Experience
2024/12-Present Associate Research Fellow, Dept. of Mechanical Engineering, Tsinghua University
2018/07-2024/12 Assistant Research Fellow, Dept. of Mechanical Engineering, Tsinghua University
2016/07-2018/07 Postdoctoral Fellow, Dept. of Mechanical Engineering, Tsinghua University
Areas of Research Interests/ Research Projects
To address the ultra-precision motion displacement measurement requirements for advanced semiconductor equipment and achieve picometer-level measurement accuracy, this research systematically investigates fundamental theories and core technologies including ultra-precision laser interferometry displacement measurement, ultra-precision grating interferometry displacement measurement, and large-scale high-accuracy holographic planar grating fabrication based on scanning interference lithography.
As the technical leader, I spearheaded the development of China's first large-range ultra-high-precision planar grating interferometric displacement measurement system, with key technical specifications reaching the advanced level of international counterparts. I have led or participated in over 10 national research initiatives, including the National Science and Technology Major Projects, National Key Research and Development Program, 973 Program, 863 Program, and China Postdoctoral Science Foundation.
Academic Achievement
Published 16 SCI/EI-indexed papers as first author, co-first author, or corresponding author. Secured over 30 national invention patents (including 7 U.S. patents) as a primary inventor (ranked top 3).
Honors And Awards
2023 Silver Award of China Patent Award
2018 First Prize of Beijing Science and Technology Award
