Selected publications:
1. Y. Xia, L. Wang, Y. Zhu, R. Cheng, W. Ye, and M. Zhang, “Quadpass homodyne interferometer with picometer periodic nonlinearity and no beam walk-off,” IEEE Sensors Journal, vol. 23, no. 14, pp. 15 512– 15 522, 2023.
2. Y. Xia, Y. Zhu, M. Zhang, and W. Ye, “Correction unwrapping algorithm based on phase estimation for undersampled homodyne interferometer,” in 2023 5th International Conference on Intelligent Control, Measurement and Signal Processing (ICMSP). IEEE, 2023, pp. 1050– 1054.
3. Y. Xia, L. Wang, Y. Zhu, R. Cheng, W. Ye, M. Zhang, and L. Xu, “An undersampling phase measurement algorithm based on parameter estimation for homodyne interferometer,” Measurement, vol. 217, p. 112988, 2023.
4. E. Zhang, W. Ye, Y. Xia, L. Wang, and M. Zhang, “Identification and analysis of ghost reflection in the interferometers based on zemax by optimization algorithms,” Optical Engineering, vol. 62, no. 3, pp. 034 103– 034 103, 2023.
5. Y. Xia, L. Wang, Y. Zhu, R. Cheng, M. Zhang, and W. Ye, “Method for suppressing periodic nonlinear errors caused by high-order optical crosstalk in high-subdivision homodyne interferometer,” Optics and Lasers in Engineering, vol. 162, p. 107387, 2023.
6. W. Ye, R. Cheng, M. Zhang, Y. Zhu, L. Wang, J. Hu, and X. Li, “Grating interferometer with redundant design for performing wide-range displacement measurements,” Sensors, vol. 22, no. 10, p. 3738, 2022.
7. Y. Xia, M. Zhang, Y. Zhu, and W. Ye, “Displacement calculation method for homodyne interferometers based on spatial phase delay of beams,” Optical Engineering, vol. 61, no. 1, pp. 014 106–014 106, 2022.
8. Y. Xia, M. Zhang, Y. Zhu, L. Wang, and W. Ye, “Method for measuring the relative phases among the three beams in the case of homodyne three-beam interference,” Applied Optics, vol. 60, no. 11, pp. 3136–3148, 2021.
9. Y. Xia, M. Zhang, Y. Zhu, W. Ye, F. Yang, and L. Wang, “Analysis of the errors caused by disturbed multimode fibers in the interferometer with fiber-coupled delivery,” Sensors, vol. 20, no. 5, p. 1513, 2020.
10. W. Ye, L. Wang, M. Zhang, Y. Zhu, J. Hu, X. Li, and C. Hu, “Error analysis of the geometric self-calibration of the grating interferometer system for the wafer stage,” in 2019 2nd World Conference on Mechanical Engineering and Intelligent Manufacturing (WCMEIM). IEEE, 2019, pp. 765–769.
11. W. Ye, M. Zhang, Y. Zhu, L. Wang, J. Hu, X. Li, and C. Hu, “Realtime displacement calculation and offline geometric calibration of the grating interferometer system for ultra-precision wafer stage measurement,” Precision Engineering, vol. 60, pp. 413–420, 2019.
12. F. Yang, M. Zhang, Y. Zhu, W. Ye, L. Wang, and Y. Xia, “Two degreeof- freedom fiber-coupled heterodyne grating interferometer with milliradian operating range of rotation,” Sensors, vol. 19, no. 14, p. 3219, 2019.
13. W. Ye, M. Zhang, Y. Zhu, L. Wang, J. Hu, X. Li, and C. Hu, “Ultraprecision real-time displacements calculation algorithm for the grating interferometer system,” Sensors, vol. 19, no. 10, p. 2409, 2019.
14. F. Yang, M. Zhang, W. Ye, and L. Wang, “Three-degrees-of-freedom laser interferometer based on differential wavefront sensing with wide angular measurement range,” Applied optics, vol. 58, no. 3, pp. 723–728, 2019.
15. W. Ye, M. Zhang, Y. Zhu, L. Wang, J. Hu, X. Li, and C. Hu, “Translational displacement computational algorithm of the grating interferometer without geometric error for the wafer stage in a photolithography scanner,” Optics express, vol. 26, no. 26, pp. 34 734–34 752, 2018.
