Associate Professor

M.S., Tsinghua University, 1997

B.S., Tsinghua University, 1992

2013-Present, Dept. of Mechanical Engineering, Tsinghua Unviversity, Beijing,

1997-2012, Dept. of Prec. Instrument and Mechanology, Tsinghua University, Beijing,

Ultra-Precision Motion System’s Identification and Control

Active vibration isolation control

CNC Technology.

[1] YANG Jin, YIN Wensheng, ZHU Yu, et al．Structured uncertainty modeling of position-dependent model variations for an ultra-precision stage [C]. Proceedings IEEE/ASME International conference on advanced intelligent mechatronics, Kaohsiung, 11-14 July, 2012．

[2] Yang Jin, Yin Wensheng, Zhu Yu, Hu Jinchun, Duan Guanghong. Controller bandwidth optimization for ultra-precision position stage[J]. Journal of Mechanical Engineering, v 47, n 16, p 9-13, August 20, 2011.

[3] YANG Jin, YIN Wensheng, DUAN Guanghong. MIMO Identification of 3 DOF Planar Micro Positioning Stage[C]. Proceedings of International Conference on Electrical and Control Engineering, ICECE 2010, Wuhan, China, 26-28 June, 2010: 1272-1275.

[4] Jiang Enze, Yin Wensheng. Analysis of current distribution for permanent magnet synchronous planar motors [J]. Proceedings of the Chinese Society of Electrical Engineering, v 31, n 9, p 71-75, March 25, 2011.

[5] Yang Yibo, Yin Wensheng, Zhu Yu. Modeling and Analysis of the Coupling Effect for one Kind of Coarse-fine Stages [C]. The 7th IEEE International Conference on Control & Automation, Christchurch, 9-11 Dec, 2009.

[6] Zhang Mingchao, Yin Wensheng, Zhu Yu. Force ripple modeling and suppression in permanent magnet linear synchronous motors[J]. Journal of Tsinghua University Science and Technology, 2010, 50(8): 1253-1257.

[7] Yang Yibo ,Yin Wensheng, Zhu Yu, Wang Chunhong. Modeling and analyzing for ultra-precision coarse-fine stage [J]. China Mechanical Engineering, v 19, n 23, p 2773-2776, December 10, 2008

[8] Sang Xiaoru, YIN Wensheng. Observability of the performance evaluating area and optimized robust control of an ultra-precision stage[C]. 2012 Proceedings of International Conference on Modelling, Identification & Control (ICMIC). IEEE, 2012: 102-107.

[9] WANG Chunhong, YIN Wensheng, DUAN Guanghong. Cross-Coupling Control for Synchronized Scan of Experimental Wafer and Reticle Stage[C]. International Technology and Innovation Conference, Hangzhou, 6-7 Nov, 2006: 1168-1172.

[10] WANG Chunhong, ZHANG Ming , YIN Wensheng, et al. Model Analysis of Air-bearing xy-Stage with Dual-side Actuators[J]. MACHINE TOOL & HYDRAULICS,2008, 36(9).