Associate Professor

Rong CHENG

Ph.D. in Polymer Chemistry and Physics, Changchun Institute of Applied Chemistry Chinese Academy of Sciences, China, 2009

B.S. in Chemistry, Jilin University, China, 2002

2009.10 - 2014.11 Tsinghua University, Beijing. Postdoctoral Researcher

2014.12 - 2023.1 Tsinghua University, Beijing. Assistant Professor

2023.2 - present Tsinghua University, Beijing. Associate Professor

Her research interest focuses on the high-end integrated circuit manufacturing equipment and its core components, like the dual-stage wafer stage of lithography machines. The primary work involves material properties and fabrication processes related to semiconductor manufacturing equipment, including ceramic and heterogeneous material bonding processes, material outgassing characteristics and regulation in vacuum environments, and the preparation of hydrophobic surface coatings for components.

1. Ye W, Cheng R, Zhang M, Zhu Y, Wang L, Hu J, Li X. Grating interferometer with redundant design for performing wide-range displacement measurements. Sensors. 2022 May 14;22(10):3738.

2. Li M, Xiong J, Cheng R, Zhu Y, Yang K, Sun F. Rational feedforward tuning using variance-optimal instrumental variables method based on dual-loop iterative learning control. IEEE Transactions on Industrial Informatics. 2022 Apr 12;19(3):2585-95.

3. Li M, Chen T, Cheng R, Yang K, Zhu Y, Mao C. Dual-loop iterative learning control with application to an ultraprecision wafer stage. IEEE Transactions on Industrial Electronics. 2021 Oct 21;69(11):11590-9.

4. Xia Y, Wang L, Zhu Y, Cheng R, Zhang M, Ye W. Method for suppressing periodic nonlinear errors caused by high-order optical crosstalk in high-subdivision homodyne interferometer. Optics and Lasers in Engineering. 2023 Mar 1;162:107387.

5. Zhao J, Zhang M, Zhu Y, Cheng R, Li X, Wang L. Concurrent optimization of the internal flow channel, inlets, and outlets in forced convection heat sinks. Structural and Multidisciplinary Optimization. 2021 Jan;63:121-36.

6. Cheng R, Huang W, Liu X, Ling FC, Gao J, Ni H. The preparation of grid-textured V2O5 films and their potential applications in gas sensing. Science China Technological Sciences. 2020 Mar;63(3):467-71.

7. Sun H, Cheng R, Yang K, Zhu Y, Lu S. Torque ripple error compensation of high‐dynamic coil array commutation algorithm for magnetic levitation planar motor. IET Electric Power Applications. 2020 May;14(5):809-17.

8. Xia Y, Wang L, Zhu Y, Cheng R, Zhang M, Ye W. Method for suppressing periodic nonlinear errors caused by high-order optical crosstalk in high-subdivision homodyne interferometer. Optics and Lasers in Engineering. 2023 Mar 1;162:107387.

9. Xia Y, Wang L, Zhu Y, Cheng R, Ye W, Zhang M, Xu L. An undersampling phase measurement algorithm based on parameter estimation for homodyne interferometer. Measurement. 2023 Aug 1;217:112988.

10. Xia Y, Wang L, Zhu Y, Cheng R, Ye W, Zhang M. Quad-pass homodyne interferometer with picometer periodic nonlinearity and no beam walk-off. IEEE Sensors Journal. 2023 Jun 8;23(14):15512-22.

[1] Two-degree-of-freedom heterodyne grating interferometry measurement system US11307018b2

[2] Five-degree-of-freedom heterodyne grating interferometry US11703361b2