Professor

Ph.D., Candidate, Tsinghua University, 2005.7

M.S., China Academy of Launch Vehicle Technology, 1999.4

B.S., University of Science and Technology Beijing, 1996.7

2013.1-Present, Dept. of Mechanical Engineering, Tsinghua University, Associate Research Fellow

2011.10-2012.12, Dept. of Prec. Instrument and Mechanology, Tsinghua University, Associate Research Fellow

2007.10-2011.10, Dept. of Prec. Instrument and Mechanology, Tsinghua University, Research Assistant

2005.7-2007.9, Department of Engineering Mechanics, Tsinghua University, Postdoctoral Fellow

1999.4-2000.8, China Academy of Launch Vehicle Technology, Assistant Engineer

The design of ultra-precision motion stage of high-end semiconductor manufacturing equipment, including:

Ultra-precision mechanical design and manufacturing

System modeling and analysis

The design of high-precision linear motor and planar motor

[1] Zhu, Y , Liu, F, Zhang, M., Min, W , Hu, JC, Yin, WS, Xia, HH. Optimal design of ironless permanent magnet planar motors for minimisation of force ripples. IET Electric Power Applications, 2013, 7(4): 321-330.

[2] Hu, C., Zhu, Y., Hu, J., Zhang, M., & Xu, D.. A Holistic Self-Calibration Algorithm for Precision Metrology Systems. IEEE Transactions on Instrumentation and Measurement, 2012, 61(9), 2492-2500.

[3] Gao, Z. Y., Zhang, M., Hu, J. C., Zhu, Y., & Duan, G. H. Interferometer Environmental Error Compensation Based on Refractive Index’s Spatio-Temporal Coupling Model. Advanced Materials Research, 2011, 219, 670-674.

[4] Lu Jun Li, Ming Zhang, Yu Zhu, Jin Chun Hu. Analysis of vacuum-degree limit of plane circular high-vacuum gas-bearing. Key Engineering Materials Journal, 2011, 467, 940-949.

[5] Liu, Y., Zhang, M., Zhu, Y., Yang, J., & Chen, B.. Optimization of voice coil motor to enhance dynamic response based on an improved magnetic equivalent circuit model. IEEE Transactions on Magnetics, 2011, 47(9), 2247-2251.

[6] Min, W., Zhang, M., Zhu, Y., Liu, F., Duan, G., Hu, J., & Yin, W.. Analysis and design of novel overlapping ironless windings for planar motors. IEEE Transactions on Magnetics, 2011, 47(11), 4635-4642.

[7] Min Wei, Zhang Ming, Zhu Yu, Chen Badong, Duan Guanghong, Hu Jinchun, Yin Wensheng. Analysis and optimization of a new 2-D magnet array for planar motor. IEEE Transactions on Magnetics, 2010, 46(5): 1167-1171.

[8] Zhu Yu, Zhang Ming, Li Guang, Wang Jinsong, Hu Jinchun, Yin Wensheng, Yang Kaiming, Zhang Li, Ma Jing, Xu Yan, Li Yujie, Tian Li, Duan Guanghong. Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof. US Patent 8,599,361, 2013.